Ultra-compact micromirror with polymeric hard magnet for use in endoscopic imaging

  1. Weber, N.
  2. Hertkorn, D.
  3. Zappe, H.
  4. Seifert, A.
Proceedings:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781424496327

Year of publication: 2011

Pages: 732-735

Type: Conference paper

DOI: 10.1109/MEMSYS.2011.5734529 GOOGLE SCHOLAR
Data source: Scopus