Tunable all-silicone multi-chamber achromatic microlens

  1. Waibel, P.
  2. Mader, D.
  3. Liebetraut, P.
  4. Zappe, H.
  5. Seifert, A.
Proceedings:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781424496327

Year of publication: 2011

Pages: 728-731

Type: Conference paper

DOI: 10.1109/MEMSYS.2011.5734528 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus