Tunable MEMS fiber scanner for confocal microscopy

  1. Weber, N.
  2. Meinert, T.
  3. Zappe, H.
  4. Seifert, A.
Proceedings:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781479935086

Year of publication: 2014

Pages: 881-884

Type: Conference paper

DOI: 10.1109/MEMSYS.2014.6765782 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus