Atomic layer deposition on biological macromolecules

  1. Knez, M.
  2. Nielsch, K.
  3. Patil, A.J.
  4. Mann, S.
  5. Gösele, U.
Proceedings:
ECS Transactions

ISSN: 1938-6737 1938-5862

ISBN: 9781566775427

Year of publication: 2006

Volume: 3

Issue: 15

Pages: 219-225

Type: Conference paper

DOI: 10.1149/1.2721490 GOOGLE SCHOLAR