Synthesis and surface engineering of complex nanostructures by atomic layer deposition

  1. Knez, M.
  2. Nielsch, K.
  3. Niinistö, L.
Journal:
Advanced Materials

ISSN: 0935-9648

Year of publication: 2007

Volume: 19

Issue: 21

Pages: 3425-3438

Type: Review

DOI: 10.1002/ADMA.200700079 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus