Flexible replication technique for high-aspect-ratio nanostructures
- Szeghalmi, A.
- Sklarek, K.
- Helgert, M.
- Brunner, R.
- Erfurth, W.
- Gosele, U.
- Knez, M.
ISSN: 1613-6810, 1613-6829
Year of publication: 2010
Volume: 6
Issue: 23
Pages: 2701-2707
Type: Article