Guided mode resonance sensors for the monitoring of film growth in atomic layer deposition
- Szeghalmi, A.
- Kley, E.B.
- Knez, M.
Aktak:
Optics InfoBase Conference Papers
ISSN: 2162-2701
ISBN: 9781557529138
Argitalpen urtea: 2011
Mota: Biltzar ekarpena