Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39nm structures

  1. Mayer, M.
  2. Grévent, C.
  3. Szeghalmi, A.
  4. Knez, M.
  5. Weigand, M.
  6. Rehbein, S.
  7. Schneider, G.
  8. Baretzky, B.
  9. Schütz, G.
Journal:
Ultramicroscopy

ISSN: 0304-3991 1879-2723

Year of publication: 2011

Volume: 111

Issue: 12

Pages: 1706-1711

Type: Article

DOI: 10.1016/J.ULTRAMIC.2011.09.003 GOOGLE SCHOLAR