High aspect ratio deep UV wire grid polarizer fabricated by double patterning

  1. Weber, T.
  2. Käsebier, T.
  3. Szeghalmi, A.
  4. Knez, M.
  5. Kley, E.-B.
  6. Tünnermann, A.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2012

Volume: 98

Pages: 433-435

Type: Conference paper

DOI: 10.1016/J.MEE.2012.07.044 GOOGLE SCHOLAR
Data source: Scopus