Tuning of optical properties by atomic layer deposition

  1. Qin, Y.
  2. Vogelgesang, R.
  3. Eßlinger, M.
  4. Knez, M.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819493828

Year of publication: 2013

Volume: 8613

Type: Conference paper

DOI: 10.1117/12.2003613 GOOGLE SCHOLAR
Data source: Scopus