Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV

1. Keskinbora, K.
2. Robisch, A.-L.
3. Mayer, M.
4. Sanli, U.T.
5. Grévent, C.
6. Wolter, C.
7. Weigand, M.
8. Szeghalmi, A.
9. Knez, M.
10. Salditt, T.
11. Schütz, G.

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DOI: 10.1364/OE.22.018440 GOOGLE SCHOLAR lock_openOpen access editor

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