Reversible and Irreversible Reactions of Trimethylaluminum with Common Organic Functional Groups as a Model for Molecular Layer Deposition and Vapor Phase Infiltration

  1. Yang, F.
  2. Brede, J.
  3. Ablat, H.
  4. Abadia, M.
  5. Zhang, L.
  6. Rogero, C.
  7. Elliott, S.D.
  8. Knez, M.
Revue:
Advanced Materials Interfaces

ISSN: 2196-7350

Année de publication: 2017

Volumen: 4

Número: 18

Type: Article

DOI: 10.1002/ADMI.201700237 GOOGLE SCHOLAR lock_openAccès ouvert editor