Reversible and Irreversible Reactions of Trimethylaluminum with Common Organic Functional Groups as a Model for Molecular Layer Deposition and Vapor Phase Infiltration

1. Yang, F.
2. Brede, J.
3. Ablat, H.
4. Abadia, M.
5. Zhang, L.
6. Rogero, C.
7. Elliott, S.D.
8. Knez, M.

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DOI: 10.1002/ADMI.201700237 GOOGLE SCHOLAR lock_openOpen access editor

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