Reversible and Irreversible Reactions of Trimethylaluminum with Common Organic Functional Groups as a Model for Molecular Layer Deposition and Vapor Phase Infiltration
- Yang, F.
- Brede, J.
- Ablat, H.
- Abadia, M.
- Zhang, L.
- Rogero, C.
- Elliott, S.D.
- Knez, M.
Zeitschrift:
Advanced Materials Interfaces
ISSN: 2196-7350
Datum der Publikation: 2017
Ausgabe: 4
Nummer: 18
Art: Artikel
