3D structure revealing of thin films by means of focal series

  1. Pustovalov, E.V.
  2. Fedorets, A.N.
  3. Modin, E.B.
  4. Tkachev, V.V.
  5. Plotnikov, V.S.
Journal:
Defect and Diffusion Forum

ISSN: 1662-9507,  1012-0386

ISBN: 9783035714777

Year of publication: 2018

Volume: 386 DDF

Pages: 332-337

Type: Conference paper

DOI: 10.4028/WWW.SCIENTIFIC.NET/DDF.386.332 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus