Nondestructive femtosecond laser lithography of Ni nanocavities by controlled thermo-mechanical spallation at the nanoscale
- Temnov, V.V.
- Alekhin, A.
- Samokhvalov, A.
- Ivanov, D.S.
- Lomonosov, A.
- Vavassori, P.
- Modin, E.
- Veiko, V.P.
ISSN: 1530-6992, 1530-6984
Year of publication: 2020
Volume: 20
Issue: 11
Pages: 7912-7918
Type: Article