Nondestructive femtosecond laser lithography of Ni nanocavities by controlled thermo-mechanical spallation at the nanoscale

1. Temnov, V.V.
2. Alekhin, A.
3. Samokhvalov, A.
4. Ivanov, D.S.
5. Lomonosov, A.
6. Vavassori, P.
7. Modin, E.
8. Veiko, V.P.