The formation of clusters and nanocrystals in Er-implanted hexagonal silicon carbide
- Kaiser, U.
- Muller, D.A.
- Chuvilin, A.
- Pasold, G.
- Witthuhn, W.
ISSN: 1431-9276
Year of publication: 2004
Volume: 10
Issue: 2
Pages: 301-310
Type: Conference paper