Oxygen induced strain field homogenization in AlN nucleation layers and its impact on GaN grown by metal organic vapor phase epitaxy on sapphire: An x-ray diffraction study

1. Bläsing, J.
2. Krost, A.
3. Hertkorn, J.
4. Scholz, F.
5. Kirste, L.
6. Chuvilin, A.
7. Kaiser, U.