The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity

  1. Stenzel, O.
  2. Wilbrandt, S.
  3. Kaiser, N.
  4. Vinnichenko, M.
  5. Munnik, F.
  6. Kolitsch, A.
  7. Chuvilin, A.
  8. Kaiser, U.
  9. Ebert, J.
  10. Jakobs, S.
  11. Kaless, A.
  12. Wüthrich, S.
  13. Treichel, O.
  14. Wunderlich, B.
  15. Bitzer, M.
  16. Grössl, M.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2009

Volume: 517

Issue: 21

Pages: 6058-6068

Type: Article

DOI: 10.1016/J.TSF.2009.05.009 GOOGLE SCHOLAR