Engineering block copolymer materials for patterning ultra-low dimensions

  1. Cummins, C.
  2. Pino, G.
  3. Mantione, D.
  4. Fleury, G.
Journal:
Molecular Systems Design and Engineering

ISSN: 2058-9689

Year of publication: 2020

Volume: 5

Issue: 10

Pages: 1642-1657

Type: Review

DOI: 10.1039/D0ME00118J GOOGLE SCHOLAR

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