Hydrosiloxane modified styrene-diene block copolymer resists
- Gabor, A.H.
- Lehner, E.A.
- Mao, G.
- Ober, C.K.
- Long, T.E.
- Schell, B.A.
- Tiberio, R.C.
ISSN: 1996-756X, 0277-786X
Argitalpen urtea: 1993
Alea: 1925
Orrialdeak: 499-506
Mota: Biltzar ekarpena
Aktak:
Proceedings of SPIE - The International Society for Optical Engineering