Comprehensive approach to MuGFET metrology

  1. Lorusso, G.F.
  2. Leray, P.
  3. Vandeweyer, T.
  4. Ercken, M.
  5. Delvaux, C.
  6. Pollentier, I.
  7. Cheng, S.
  8. Collaert, N.
  9. Rooyackers, R.
  10. Degroote, B.
  11. Jurczak, M.
  12. Biesemans, S.
  13. Richard, O.
  14. Bender, H.
  15. Azordegan, A.
  16. McCormack, J.
  17. Shirke, S.
  18. Prochazka, J.
  19. Long, T.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819461957

Year of publication: 2006

Volume: 6152 I

Type: Conference paper

DOI: 10.1117/12.656076 GOOGLE SCHOLAR