Oxygen plasma-assisted ultra-low temperature sol-gel-preparation of the PZT thin films

  1. Li, H.
  2. Hu, Y.
  3. Wei, S.
  4. Meng, Y.
  5. Wang, N.
  6. Zhang, Q.
  7. Liu, L.
  8. Peng, B.
Revue:
Ceramics International

ISSN: 0272-8842

Année de publication: 2023

Volumen: 49

Número: 7

Pages: 10864-10870

Type: Article

DOI: 10.1016/J.CERAMINT.2022.11.279 GOOGLE SCHOLAR