Oxygen plasma-assisted ultra-low temperature sol-gel-preparation of the PZT thin films

  1. Li, H.
  2. Hu, Y.
  3. Wei, S.
  4. Meng, Y.
  5. Wang, N.
  6. Zhang, Q.
  7. Liu, L.
  8. Peng, B.
Journal:
Ceramics International

ISSN: 0272-8842

Year of publication: 2023

Volume: 49

Issue: 7

Pages: 10864-10870

Type: Article

DOI: 10.1016/J.CERAMINT.2022.11.279 GOOGLE SCHOLAR