Oxygen plasma-assisted ultra-low temperature sol-gel-preparation of the PZT thin films
- Li, H.
- Hu, Y.
- Wei, S.
- Meng, Y.
- Wang, N.
- Zhang, Q.
- Liu, L.
- Peng, B.
ISSN: 0272-8842
Year of publication: 2023
Volume: 49
Issue: 7
Pages: 10864-10870
Type: Article