Ultrathin metallic membranes to be used in tunable RFMEMS volume capacitors

  1. Etxeberria, J.A.
  2. Sancho, A.
  3. De La Fuente, P.
  4. Gracia, F.J.
  5. Cabezón, X.
Proceedings:
Proceedings of IEEE Sensors

ISBN: 9780780390560

Year of publication: 2005

Volume: 2005

Pages: 448-451

Type: Conference paper

DOI: 10.1109/ICSENS.2005.1597732 GOOGLE SCHOLAR
Data source: Scopus