Investigation of interfacial structures of nano-scale TiN/AlN multilayer by neutron and X-ray reflectometry

1. Du, X.M.
2. Zheng, K.F.
3. Liu, R.D.
4. Chen, D.F.
5. Liu, Y.T.
6. Petrenko, V.I.
7. Zhang, G.
8. Huang, C.Q.
9. Gapon, I.V.