Physical and morphological characterization of reactively magnetron sputtered TiN films
- Vaz, F.
- Machado, P.
- Rebouta, L.
- Mendes, J.A.
- Lanceros-Méndez, S.
- Cunha, L.
- Nascimento, S.M.C.
- Goudeau, Ph.
- Rivière, J.P.
- Alves, E.
- Sidor, A.
ISSN: 0040-6090
Argitalpen urtea: 2002
Alea: 420-421
Orrialdeak: 421-428
Mota: Biltzar ekarpena