Physical and morphological characterization of reactively magnetron sputtered TiN films

1. Vaz, F.
2. Machado, P.
3. Rebouta, L.
4. Mendes, J.A.
5. Lanceros-Méndez, S.
6. Cunha, L.
7. Nascimento, S.M.C.
8. Goudeau, Ph.
9. Rivière, J.P.
10. Alves, E.
11. Sidor, A.