Property change in multifunctional TiCxOy thin films: Effect of the O/Ti ratio

  1. Fernandes, A.C.
  2. Carvalho, P.
  3. Vaz, F.
  4. Lanceros-Méndez, S.
  5. Machado, A.V.
  6. Parreira, N.M.G.
  7. Pierson, J.F.
  8. Martin, N.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2006

Volume: 515

Issue: 3

Pages: 866-871

Type: Article

DOI: 10.1016/J.TSF.2006.07.047 GOOGLE SCHOLAR