Thin-film bulk acoustic resonators and filters using ZnO and lead-zirconium-titanate thin films

  1. Su, Q.-X.
  2. Kirby, P.
  3. Komuro, E.
  4. Imura, M.
  5. Zhang, Q.
  6. Whatmore, R.
Journal:
IEEE Transactions on Microwave Theory and Techniques

ISSN: 0018-9480

Year of publication: 2001

Volume: 49

Issue: 4 II

Pages: 769-778

Type: Article

DOI: 10.1109/22.915462 GOOGLE SCHOLAR
Data source: Scopus