Comparative microstructure and electrical property studies of lead scandium tantalate thin films as prepared by LDCVD, sol-gel and sputtering techniques
- Huang, Z.
- Donohue, P.P.
- Zhang, Q.
- Williams, D.J.
- Anthony, C.J.
- Whatmore, R.W.
- Todd, M.A.
ISSN: 0022-3727
Year of publication: 2003
Volume: 36
Issue: 3
Pages: 270-279
Type: Article