Comparative microstructure and electrical property studies of lead scandium tantalate thin films as prepared by LDCVD, sol-gel and sputtering techniques

  1. Huang, Z.
  2. Donohue, P.P.
  3. Zhang, Q.
  4. Williams, D.J.
  5. Anthony, C.J.
  6. Whatmore, R.W.
  7. Todd, M.A.
Revista:
Journal of Physics D: Applied Physics

ISSN: 0022-3727

Any de publicació: 2003

Volum: 36

Número: 3

Pàgines: 270-279

Tipus: Article

DOI: 10.1088/0022-3727/36/3/309 GOOGLE SCHOLAR