Soft lithographic patterning of oxide thin films

  1. Abad, E.
  2. Whatmore, R.W.
  3. Zhang, Q.
  4. Huang, Z.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Year of publication: 2003

Volume: 5116 I

Pages: 176-184

Type: Conference paper

DOI: 10.1117/12.499780 GOOGLE SCHOLAR
Data source: Scopus