Nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers for MEMS applications
- Chima-Okereke, C.
- Reece, M.J.
- Bushby, A.J.
- Whatmore, R.W.
- Zhang, Q.
Proceedings:
Materials Research Society Symposium Proceedings
ISSN: 0272-9172
Year of publication: 2005
Volume: 841
Pages: 351-356
Type: Conference paper