Experimental, analytical, and finite element analyses of nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers
- Chima-Okereke, C.
- Bushby, A.J.
- Reece, M.J.
- Whatmore, R.W.
- Zhang, Q.
ISSN: 0884-2914
Year of publication: 2006
Volume: 21
Issue: 2
Pages: 409-419
Type: Article