Design, fabrication and characterisation of high frequency piezoelectric micromachined ultrasonic transducers

  1. Duval, F.
  2. Hladky-Hennion, A-C.
  3. Cattan, E.
  4. Zhang, Q.
  5. Dorey, R.
Proceedings:
Proceedings - IEEE Ultrasonics Symposium

ISSN: 1051-0117

ISBN: 9781424402014

Year of publication: 2006

Volume: 1

Pages: 1959-1962

Type: Conference paper

DOI: 10.1109/ULTSYM.2006.495 GOOGLE SCHOLAR
Data source: Scopus