Focussed ion beam etching of the interfacial region of lead zirconate titanate thin film after laser-release from sapphire fabrication substrate

  1. Chakraborty, T.
  2. Xu, B.
  3. Harrington, J.
  4. Chakraborty, S.
  5. Zhang, Q.
  6. Miles, R.E.
  7. Dorey, R.
  8. Milne, S.J.
Actes de conférence:
2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings

Année de publication: 2006

Volumen: 3

Pages: 162-165

Type: Communication dans un congrès