Focussed ion beam etching of the interfacial region of lead zirconate titanate thin film after laser-release from sapphire fabrication substrate
- Chakraborty, T.
- Xu, B.
- Harrington, J.
- Chakraborty, S.
- Zhang, Q.
- Miles, R.E.
- Dorey, R.
- Milne, S.J.
Proceedings:
2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Year of publication: 2006
Volume: 3
Pages: 162-165
Type: Conference paper