Focussed ion beam etching of the interfacial region of lead zirconate titanate thin film after laser-release from sapphire fabrication substrate

  1. Chakraborty, T.
  2. Xu, B.
  3. Harrington, J.
  4. Chakraborty, S.
  5. Zhang, Q.
  6. Miles, R.E.
  7. Dorey, R.
  8. Milne, S.J.
Konferenzberichte:
2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings

Datum der Publikation: 2006

Ausgabe: 3

Seiten: 162-165

Art: Konferenz-Beitrag