Stress-induced phase formation of PZT 52/48 thin films
- Zhang, Q.
- Cordova, S.
- Marshall, J.M.
- Shaw, C.P.
- Whatmore, R.W.
ISSN: 1058-4587, 1607-8489
Year of publication: 2007
Volume: 88
Issue: 1
Pages: 85-92
Type: Conference paper
ISSN: 1058-4587, 1607-8489
Year of publication: 2007
Volume: 88
Issue: 1
Pages: 85-92
Type: Conference paper