Fabrication of high aspect ratio nanostructures on 3D surfaces

  1. Senn, T.
  2. Esquivel, J.P.
  3. Sabaté, N.
  4. Löchel, B.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2011

Volume: 88

Issue: 9

Pages: 3043-3048

Type: Article

DOI: 10.1016/J.MEE.2011.05.004 GOOGLE SCHOLAR
Data source: Scopus