A MEMS capacitor with improved RF power handling capability
- Girbau, D.
- Otegi, N.
- Pradell, L.
- Lázaro, A.
Proceedings:
35th European Microwave Conference 2005 - Conference Proceedings
ISBN: 9782960055122
Year of publication: 2005
Volume: 3
Pages: 1447-1450
Type: Conference paper