Nanoimprint lithography and surface modification as prospective technologies for heterogeneous integration

  1. Kehagias, N.
  2. Hu, W.
  3. Reboud, V.
  4. Lu, N.
  5. Dong, B.
  6. Chi, L.
  7. Fuchs, H.
  8. Genua, A.
  9. Alduncín, J.A.
  10. Pomposo, J.A.
  11. Mecerreyes, D.
  12. Torres, C.M.S.
Revista:
Physica Status Solidi (C) Current Topics in Solid State Physics

ISSN: 1862-6351

Ano de publicación: 2008

Volume: 5

Número: 12

Páxinas: 3571-3575

Tipo: Achega congreso

DOI: 10.1002/PSSC.200780226 GOOGLE SCHOLAR
Fonte de datos: Scopus