Nanoimprint lithography and surface modification as prospective technologies for heterogeneous integration
- Kehagias, N.
- Hu, W.
- Reboud, V.
- Lu, N.
- Dong, B.
- Chi, L.
- Fuchs, H.
- Genua, A.
- Alduncín, J.A.
- Pomposo, J.A.
- Mecerreyes, D.
- Torres, C.M.S.
ISSN: 1862-6351
Argitalpen urtea: 2008
Alea: 5
Zenbakia: 12
Orrialdeak: 3571-3575
Mota: Biltzar ekarpena