Highly integrated COP monolithic membrane microvalves by robust hot embossing
- Etxebarria, J.
- Berganzo, J.
- Elizalde, J.
- Fernández, L.J.
- Ezkerra, A.
Revue:
Sensors and Actuators, B: Chemical
ISSN: 0925-4005
Année de publication: 2014
Volumen: 190
Pages: 451-458
Type: Article