A novel micro- and nano-scale positioning sensor based on radio frequency resonant cavities
- Asua, E.
- Etxebarria, V.
- García-Arribas, A.
- Feutchwanger, J.
- Portilla, J.
- Lucas, J.
ISSN: 1424-8220
Year of publication: 2014
Volume: 14
Issue: 6
Pages: 9615-9627
Type: Article