Liquid-Assisted Laser Nanotexturing of Silicon: Onset of Hydrodynamic Processes Regulated by Laser-Induced Periodic Surface Structures

  1. Borodaenko, Y.
  2. Pavlov, D.
  3. Cherepakhin, A.
  4. Mitsai, E.
  5. Pilnik, A.
  6. Syubaev, S.
  7. Gurbatov, S.O.
  8. Modin, E.
  9. Porfirev, A.P.
  10. Khonina, S.N.
  11. Shevlyagin, A.V.
  12. Gurevich, E.L.
  13. Kuchmizhak, A.A.
Zeitschrift:
Advanced Materials Technologies

ISSN: 2365-709X

Datum der Publikation: 2024

Ausgabe: 9

Nummer: 8

Art: Artikel

DOI: 10.1002/ADMT.202301567 GOOGLE SCHOLAR