Material and doping contrast in semiconductor devices at nanoscale resolution using scattering-type scanning near-field optical microscopy

  1. Wittborn, J.
  2. Weiland, R.
  3. Kazantsev, D.
  4. Huber, A.
  5. Hillenbrand, R.
  6. Keilmann, F.
Actes de conférence:
Conference Proceedings from the International Symposium for Testing and Failure Analysis

ISBN: 9780871708441

Année de publication: 2006

Volumen: 2006

Pages: 98-101

Type: Communication dans un congrès