A MEMS capacitor with improved RF power handling capability

  1. Girbau, D.
  2. Otegi, N.
  3. Pradell, L.
  4. Lazaro, A.
Buch:
GAAS 2005: 13TH EUROPEAN GALLIUM ARSENIDE AND OTHER COMPOUND SEMICONDUCTORS APPLICATION SYMPOSIUM, CONFERENCE PROCEEDINGS

ISBN: 88-902012-0-7

Datum der Publikation: 2005

Seiten: 501-504

Kongress: 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium (GAAS 2005)

Art: Konferenz-Beitrag